Seminar: The Helium ion microscope - A tool for nanoscale imaging and fabrication
- Location: Ångströmlaboratoriet, Lägerhyddsvägen 1 Å80121
- Lecturer: Kai Arstila, University of Jyväskylä, Finland
- Contact person: Daniel Primetzhofer
Helium ion microscope (HIM) is a novel imaging tool based on a focused helium ion beam scanned on an object in a similar way than the electron beam is scanned in a scanning electron microscope (SEM). The main advantages of HIM over SEM are the high imaging resolution (probe size < 0.5 nm), a very high depth of field, a high surface sensitivity, and the possibility to image non-conductive samples without conductive coating. A HIM tool can also be used for nanofabrication in a similar way than a conventional focused ion beam (FIB) tool, but with much higher resolution. Use of ions instead of electrons as probing beam allows also for development of analysing techniques, such as SIMS, RBS, channeling and Auger spectroscopy, benefitting from the high lateral resolution of the HIM. In this presentation the principles and practical examples and experiences of using a HIM at University of Jyväskylä, Finland, are presented. Guidelines will also be given on the requirements for samples and access procedure for those who are interested in using a HIM tool.